Publications

J. H. Chen*, and J. H. Davidson, "A Global Model of Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Air Containing Octamethylcyclotetrasiloxane Vapor," Plasma Chemistry and Plasma Processing 24 (4), 511-535, 2004.

 

J. H. Chen and J. H. Davidson*, "Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air Containing Octamethyl-cyclotetrasiloxane Vapor:  Measurement of the Deposition Rate," Plasma Chemistry and Plasma Processing 24 (2), 169-188, 2004.